Introduction
The Nano-R™ SPM is a powerful, multi-purpose Scanning
Probe Microscope (SPM) for making images and measurements
of structures with nanometer sized features.
Because the Nano-R™ can be used with two versions of
image acquisition software, X'pert™ and EZMode™, it is
optimized for both novice and expert users. The Nano-R™
can be purchased with the light lever (LL-AFM) or the
Crystal Scanner™ (CFM), or both. The Nano-R™ SPM combined
with a LL-AFM or CFM includes everything required
for AFM imaging; a master computer, a control unit, and
the Nano-R™ stage. Also, software for acquiring images as
well as displaying and analyzing images is provided with the
Nano-R™ SPM. See Figure 1.
The Nano-R™ SPM stage (shown in Figure 2) is a table top
unit and can be operated with high resolution results in a
normal laboratory environment. The stage is optimized for
rapidly exchanging samples and probes. The sample holder
is a versatile design so that many types of samples can be
accommodated. Once a sample is placed in the sample
holding puck, positioning the probe above the sample is rapidly
done with the automated X-Y stage and the high resolution
video microscope. The Nano-R™ SPM stage includes a
sample puck, X-Y positioning stage, Z motorized approach,
and a video optical microscope. All cables are connected at
the rear of the stage.
Scanner
The Nano-R™ SPM can be purchased with the LL-AFM scanner, the CFM scanner, or both. The LL-AFM is ideal for visualizing
nanostructures and mode measurements. The CFM has Point & Scan™ technology and is ideal for routine topography
measurements, and metrology measurements.
Motorized Z Approach
The Nano-R™ includes a unique three motor approach system that is used for moving the AFM probe to the sample for
scanning. Each motor has .33" (8.5 mm) of motion, is independently controlled, and includes position sensors. The software
for activating the Z approach motors is included with the SPMCockpit™ software.
Sample Holder
The Nano-R™ sample holder facilitates rapid introduction of a sample to the microscope stage. The holder can accommodate
a large variety of sample sizes. The standard sample holder is for standard magnetic disks. There are several optional
sample holders for the Nano-R™. Additionally, customers can fabricate their own sample "pucks". The maximum
sample size that the Nano-R™ stage can hold is 3.5" (88.9 mm) X 3.5" (88.9 mm). Custom sample holders can be easily
created for special applications.See Figure 3.
Nano-R™ AFM Stage
Automated X-Y Translation Stage
The motorized X-Y positioning stage is used for moving the
sample "puck" under the AFM probe. The stage is activated
from a window on the master computer or it may be activated
from a "track ball". Under computer control, the
stage may be moved to specific locations with user defined
step sizes. The stage positioning icon is used for "dragging"
the stage to a specific location. Software is used for energizing
the X-Y sample stage. The window for controlling the
stage is illustrated here in Figure 4. The position and rate
of travel are software controlled.
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Figure 4 |
Video Optical Microscope
A color video microscope is essential for locating features
on a surface for scanning in an AFM. The Nano-R™ AFM
has a motorized zoom and focus video microscope that is
controlled by either software or the system's trackball.
There is a manual control of the X-Y position of the microscope
objective for centering the image of the cantilever in
the video microscope image. See Figure 5.
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Figure 5 |
Controller & Master Computer
The master computer, required for acquiring and analyzing
images, is a standard PC type computer. Connection of the
computer to the control unit comes with a standard
Ethernet connector. Specifications for the computer system
are improved on a routine basis when improved computer
systems are made available. The control unit of the
Nano-R™ AFM is based on a PC microcontroller architecture
and is connected to the master computer though a
standard Ethernet port. See Figure 6.
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